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  1. United States
  2. All 3M Products
  3. Electronics Materials & Components
  4. CMP Materials
  5. CMP Pad Conditioners

3M CMP Pad Conditionersfor Semiconductor

Close up of CMP Pad conditioner
Redefining CMP pad conditioners

Diamond, soft-brush and microreplicated CMP pad conditioners from 3M, developed with your toughest semiconductor fabrication challenges in mind.

CONNECT WITH AN EXPERT

Consistent, reliable chemical mechanical planarization (CMP) pad conditioning

In the world of semiconductor fabrication, consistency, reliability and yield are critical at every part of the process. For over 25 years, 3M™ CMP Pad Conditioners have provided innovative pad conditioning solutions to some of the world’s leading semiconductor fabricators.

Explore solutions like the exclusive sintered abrasive diamond technology behind 3M™ Diamond Pad Conditioners or the precisely microreplicated patterns in 3M™ Trizact™ Pad Conditioners. Plus, metal-sensitive processes can benefit from 3M disks with metal-free cutting surfaces and 3M™ CMP Pad Conditioner Coatings for powerful additional protection from metal contamination.

Our global technical team is committed to continually redefining the cutting edge of CMP polishing pad conditioner technology. Research and manufacturing facilities around the world provide convenient product support and product supplies.

  • Family image of CMP pad conditioners from 3M
  • 3M™ Trizact™ Pad Conditioners
     

    • Metal-free cutting surface for advanced nodes
    • Enabled by proprietary microreplication process

    3M™ Diamond Pad Conditioners
     

    • Diamond-studded metal disks
    • Reliable, controlled conditioner performance

    3M™ CMP Pad Conditioner Brushes
     

    • Metal-free brushes
    • Economical pad cleaning

    3M™ Flexible Pad Conditioners
     

    • Combines the quick pad break-in time and powerful conditioning performance of diamond pad conditioners with the effective defect performance of brushes.
    • Tunable material hardness and bristle shape to optimize defectivity
    • Used for both conditioning and cleaning
    Request Product Selection Guide

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Please provide your contact information and our team will get back to you with the latest version of our 3M™ CMP Pad Conditioner Product Selection Guide, including a detailed breakdown of all 3M’s CMP solutions, from our broad range of trusted 3M™ Diamond Pad Conditioners to the latest 3M™ Trizact Pad Conditioner T Series products and more.

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Chart mapping 3M pad conditioner options by density and hardness.
A range of conditioners compatible with popular CMP pads

Our pad conditioners work with many common combinations of pad hardness and density. See what works best for you, or let our technical team test a custom specification.


Help protect against metal leaching with pad conditioner coatings

  • Technical illustration depicting coating coverage options for CMP pad conditioners
    A - Surface-only coating B - Selective-area coating C - Full-disk coating

    Are you seeing reduced chip yields, metal residues on the IC surface or diamond loss after your CMP process? As advanced and mature nodes get more sensitive and slurries get harsher, metal leaching is increasingly becoming a challenge for semiconductor manufacturers.

    Thin, clear 3M™ CMP Pad Conditioner Coatings fight back against metal leaching by trapping metal ions. 3M tests show coatings can help prevent up to 99% of metal from leaching out into the slurry or wafer while also helping reduce scratching issues. Coatings can be factory-applied to any 3M pad conditioner and help maintain a high level of process consistency and control even under challenging conditions.

    Pair them with:
     

    • 3M™ Diamond Pad Conditioner
    • 3M™ Diamond Pad Conditioner C Series
    • 3M™ Trizact™ Pad Conditioner
    • 3M™ Trizact™ Pad Conditioner T Series
    DOWNLOAD COATINGS FLYER (PDF, 401 KB)

Industry-shifting innovation in CMP pad conditioners

  • Close-up microscopic view of the microreplication pattern on the 3M™ Trizact™  CMP Pad Conditioner T Series
    3M™ Trizact™ Pad Conditioner T Series

    The T Series enhances the conventional 3M™ Trizact™ pad conditioner platform with a surface topography optimized for stronger pad activation, slower pad wear rate decay and even more consistent performance.

  • Closeup of precise diamond placement on 3M™ Diamond Pad Conditioner C Series
    3M™ Diamond Pad Conditioner C Series

    The C Series brings extra-precise diamond placement at the micrometer scale to further help control co-planarity and flatness for even more consistent performance in CMP pad conditioning.

  • Close-up of 3M™ Flexible Pad Conditioner showcasing its bristles and design for effective CMP pad conditioning and cleaning
    3M™ Flexible Pad Conditioner

    Long-lifetime, low-defect CMP pad conditioning and cleaning. The bristles, design and materials of this polymeric unibody pad conditioner can be tailored to the hardness and structure of your pad, enabling powerful performance.


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  • 3M takes your privacy seriously. 3M and its authorized third parties will use the information you provided in accordance with our Privacy Policy to send you communications which may include promotions, product information and service offers. Please be aware that this information may be stored on a server located in the U.S. If you do not consent to this use of your personal information, please do not use this system.

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8 products

Your selections:

  • Industries: Electronics
  • Electronics > Semiconductor
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  • Trizact (2)
3M(TM) Diamond Pad Conditioning Products

3M™ Diamond Pad Conditioner Ring

Options available
A 3M Flexible Pad Conditioner

3M™ Flexible Pad Conditioner

3M Stock

B5005541000

A 3M Diamond Pad Conditioner

3M™ Diamond Pad Conditioner C Series

Options available
3M™ Diamond Pad Conditioner Bar R400

3M™ Diamond Pad Conditioner Bar

Options available
Trizact CMP Pad Conditioner 3

3M™ Trizact™ Pad Conditioner T Series

Options available
A photo of 3M CMP Pad Conditioner Brush PB42A

3M™ CMP Pad Conditioner Brush

Options available
3M™ Trizact™ Pad Conditioner B6-1900 Image 4

3M™ Trizact™ Pad Conditioner

Options available
3M(TM) Diamond Pad Conditioners

3M™ Diamond Pad Conditioner

Options available
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