- Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
- Optimized for extended pad and disk life
- Diamonds secured with both chemical and mechanical bonds for great retention
- Exclusive polymer substrate enhances corrosion resistance
Carrier Size
Carrier_Size
Diamond Type
Diamond_Type
Aggressiveness
Aggressiveness
25 Products Available
Available options:
Carrier Size, Diamond Type and Aggressiveness
Specifications
|
Attribute Name
|
Value
|
|---|---|
|
Abrasive Material
|
Nickel based alloy with patterned diamond
|
|
Abrasive Working Surface
|
Full Face, Ring Face
|
|
Aggressiveness
|
1-10, 1-4, 14-16, 15-19, 18-24, 18-28, 20-26, 25-29, 25-35, 34-45, 40-50, 6-14, 6-9, 8-14, 9-10, 9-16
|
|
Application
|
CMP
|
|
Brand
|
3M™
|
|
Carrier Color
|
Black, Gray
|
|
Carrier Diameter (Imperial)
|
3.74 in, 4 in, 4.25 in
|
|
Carrier Diameter (Metric)
|
101.6 mm, 107.95 mm, 95 mm
|
|
Carrier Form
|
Disc
|
|
Carrier Format
|
Disk, Disk - double sided, Disk - with bevel edge
|
|
Carrier Material
|
304 Stainless Steel, 410 Stainless Steel, Polycarbonate
|
|
Carrier Size
|
3.74 inch diameter, 4.00 inch diameter, 4.25 inch diameter
|
|
Carrier Substrate
|
304 SS, 410 SS, Polycarbonate
|
|
Diamond Size
|
151 um, 181 um, 251 um, 63 um, 74 um, 90 um
|
|
Diamond Type
|
Type 2, blocky, Type 3, semi blocky, Type 4, semi-sharp, Type 9, sharp
|
|
Manufacturing Location
|
Singapore, Taiwan, United States
|
|
Product Type
|
Diamond Pad Conditioner
|
Product Details
- Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
- Optimized for extended pad and disk life
- Diamonds secured with both chemical and mechanical bonds for great retention
- Exclusive polymer substrate enhances corrosion resistance
Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for excellent diamond retention, with controlled diamond placement and protrusion.
Resources
Data Sheets
- 3M™ Diamond Pad Conditioner A2800 (PDF, 127.2KB)
- 3M™ Diamond Pad Conditioner A160 (PDF, 112.8KB)
- 3M™ Diamond Pad Conditioner A2810 (PDF, 132.0KB)
- 3M™ Diamond Pad Conditioner S122 (PDF, 124.2KB)
- 3M™ Diamond Pad Conditioner A165 (PDF, 121.0KB)
- 3M™ Diamond Pad Conditioner H80-AL (PDF, 109.7KB)
- 3M™ Diamond Pad Conditioner A82 (PDF, 116.3KB)
- 3M™ Diamond Pad Conditioner A2850 (PDF, 133.8KB)
- 3M™ Diamond Pad Conditioner A3700 (PDF, 125.8KB)
- 3M™ Diamond Pad Conditioner A188F (PDF, 126.3KB)
- 3M™ Diamond Pad Conditioner A188H TDS (PDF, 172.5KB)
- 3M™ Diamond Pad Conditioner A153L (PDF, 123.6KB)
- 3M™ Diamond Pad Conditioner A2812 (PDF, 128.3KB)
- 3M™ Diamond Pad Conditioner S60 (PDF, 126.2KB)
- 3M™ Diamond Pad Conditioner A98 (PDF, 121.2KB)
- 3M™ Diamond Pad Conditioner S82 (PDF, 122.0KB)
