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3M™ Trizact™ Composite Slurry Polishing Pad HT-315-E is a microreplicated composite slurry lapping and polishing pad used for finishing ultra-hard substrates, such as silicon carbide and ceramics.
A good option for the fine lapping/pre-CMP step, Trizact composite slurry polishing pad HT-315-E produces a good surface finish with high removal rates when combined with a 3M™ Trizact™ Composite Slurry. This pad is an alternative to the common copper composite platen and diamond slurry process. It may be adhered to typical single- or double-sided lapping platens.
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