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Semiconductor manufacturing process.
Help protect your yield with long-lasting seals.

Maximize machine usage. Protect chip yield. Achieve and maintain production goals by utilizing 3M™ High Performance Sealing Material Solutions.

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Fluoropolymers for high performance semiconductor seals and gaskets

Semiconductor manufacturing is trending in very clear directions: smaller, thinner and more powerful. Technologies like 5G, IoT and others drive the need for more demanding manufacturing processes than ever before. That means hotter temps, harsher chemicals and exposure to plasma. For seals and gaskets, that’s just the start.

  • 3M high temperature material sealing solutions: PFE/FKM seal example.

    A solution for every part of your semiconductor equipment

    3M™ Dyneon™ Fluoropolymers, including 3M™ Dyneon™ Perfluoroelastomers (PFE) and 3M™ Dyneon™ FKM can give semiconductor seals the ideal characteristics to help you meet your specific needs. Seals and gaskets can be more durable and help you keep your equipment running longer. They can also help you reduce your maintenance and downtime, and maximize your overall semicon production efficiency.

    Typical applications include:
     

    • PFE & FKM O-Rings
    • PFE Chamber Lid Seals
    • PFE Bonded Seals
    • PFE Pump Linings

    Download the brochure (PDF, 3.24 MB)


Let us help you specify the ideal seals and gaskets for semicon

  • Diagram representing different way seals and gaskets can help semicon production.

    Deposition, plasma ashing, etching and other processes pose unique challenges to manufacturing equipment. Our full range of fluoropolymers, seals and gaskets can be made specifically to stand up to each one.
     

    • Temperature resistance
    • Ease of maintenance/replacement
    • Cost effective
    • Chemical resistance
    • Plasma resistance
    • Purity/low metal ion content

The true value of your equipment in semiconductor operations

As semiconductor equipment is subject to greater wear and tear, it’s more important than ever for semicon manufacturers to quantify their total cost and value over time. This goes well beyond the cost of the parts – especially for seals and gaskets. The right seals can last longer, and help you prevent costly failures. They can also be optimized for low stiction during replacement, so they can help you reduce your semiconductor equipment maintenance and minimize downtime.

  • Icon representing cost-effective 3M sealing solutions.

    Cost effective

    • Material costs: 3M has a breadth of solutions to help you meet your material cost needs.

      Installation costs: 3M™ Dyneon™ Perfluoroelastomers (PFE) combined with our proprietary catalysts can produce a low-sticking layer that makes seal installation and replacement faster and easier.

      Downtime costs: Excellent plasma resistance, compression set and chemical resistance can help extend O-ring life in some of the harshest environments – and keep machines up and running longer.

  • Icon representing ease of maintenance and replacement.

    Ease of maintenance & replacement

    • Used seals can stick to semiconductor manufacturing equipment, leading to long downtimes. 3M high-temperature PFE combined with our proprietary catalysts can generate a low-sticking layer that allows used seals to be removed more quickly. Installation and replacement are easier, and semiconductor manufacturing equipment is up and running faster.

The ideal seals – no matter what your semiconductor challenges

View PFE and FFKM Selection Guide (PDF, 386.85 KB)

Our 3M experts can help you choose the right materials for high performance seals for your semiconductor manufacturing equipment applications. Recipes can be optimized for a range of conditions such as high temperatures, harsh chemicals, and exposure to plasma while minimizing the total cost of ownership.


Resources

  • Lab worker examining seals from 3M.
    3M High Performance Sealing Material Solutions Brochure
  • Semiconductor chip up close showing resistors and other parts.
    3M Materials for Semicon Sealing Product Selector
  • (DESCRIBED VIDEO) On-screen visual: Semiconductor chip fades in screen left over white background Animated on-screen text reads: 3M™ High Performance Sealing Material Solutions for Semiconductor Manufacturing Optimizing seal design to help you achieve greater performance, while minimizing maintenance and controlling your costs. (DESCRIBED VIDEO) On-screen visual: B-roll video of semiconductor chips spinning and being made. (NARRATOR) Making smaller chips that power next-generation technologies, including 5G devices, require more demanding processes that can lead to higher cost of ownership for the manufacturer. (DESCRIBED VIDEO) On-screen visual: Graphic icons representing on-screen text animate on. A thermometer, plasma, and a vial bubbling with chemicals. Animated on-screen text reads: Exposure to plasma, harsh chemicals, contaminants, and high temperature add greater wear and tear on equipment. Text corresponding to icons reads: High Temperatures Plasma Exposure Exposure to Chemicals (NARRATOR) This means harsher chemicals and hotter temperatures, which all adds greater wear and tear on equipment – especially seals and gaskets. (DESCRIBED VIDEO) On-screen visual: Still image of a scientist, wearing PPE, holding up and comparing a black and a white o-ring. (NARRATOR) To help maximize semiconductor operations, today’s manufacturers must consider this total cost of ownership when specifying sealing materials such as O-rings, gate valves, and chamber lid seals. (DESCRIBED VIDEO) On-screen visual: Graphic icons representing on-screen text animate on. A dollar sign, a hand holding a wrench, and a clock with a circular arrow showing directional clockwise movement. Animated on-screen text reads: Typical Total Cost of Ownership = O-ring costs Installation costs Downtime costs (NARRATOR) The total cost of ownership could include the o-ring costs, the installation costs for replacing the seal, and the downtime costs for not being able to operate the equipment while seals are being replaced. (DESCRIBED VIDEO) On-screen visual: Semiconductor manufacturing b-roll. Animated on-screen text reads: Optimizing manufacturing is essential. (NARRATOR) So, it is essential to optimize your manufacturing and keep costs in check with sealing solutions that help you extend the productivity of your semiconductor equipment, streamline your maintenance, and help reduce your downtime. (DESCRIBED VIDEO) On-screen visual: Graphic icons representing on-screen text animate on. A dollar sign with a directional arrow pointing downward, a hand holding a wrench, a vial bubbling with chemicals, plasma, hands catching a droplet, and a thermometer. Animated on-screen text corresponding to icons reads: Temperature Resistance Ease of Maintenance/ Replacement Cost Effective Chemical Resistance Plasma Resistance Purity/ Low Metal Ion Content (NARRATOR) At 3M, we understand both the equipment and the material exposure challenges that high performance seals come in contact with and we have a breadth of solutions to help you mitigate these challenges. (DESCRIBED VIDEO) On-screen visual: Graphic icons representing on-screen text animate on. A thermometer with arrows pointing up then down Animated on-screen text reads: High Temperature PFE Ideal for dry side (thermal processes) and plasma exposure Ideal for high temperature Peroxide Curable PFE and FKM Ideal for lower temperature applications (NARRATOR) 3M has high temperature PFE solutions for use in applications up to 315 degrees Celsius while providing excellent chemical and plasma resistance. We also have Peroxide Cureable PFEs and FKMs, that are ideal for lower temperature applications, up to 230 degree Celsius but still offer great chemical resistance. (DESCRIBED VIDEO) On-screen visual: b-roll video of semiconductor chips spinning and three scientists in full PPE coveralls walk into lab. NARRATOR) Choosing the polymer for your specific application can help you reduce unscheduled downtime and make your required replacement downtime for scheduled maintenance shorter. (DESCRIBED VIDEO) On-screen visual: Graphic representation of a cylinder with animation of hard to remove a worn out o-ring seal. Animated on-screen text reads: Difficult to remove seals contribute to higher cost of ownership. (NARRATOR) While choosing an ideal polymer for your application is helpful, seals in high temperature applications have a limited lifespan. They can stick to the mating surface making them difficult to remove and replace which result in longer downtime and increased seal replacement & installation costs. (DESCRIBED VIDEO) On-screen visual: Graphic representation of a cylinder with animation of clean easy to remove o-ring seal. Animated on-screen text reads: 3M Dyneon™ High Temperature Material Sealing Solutions Faster, cleaner o-ring replacement and installation. (NARRATOR) 3M brand Dyneon High Temperature PFE combined with our proprietary catalysts can produce a low-sticking layer that allows used seals to be removed more quickly and cleanly and make seal installation smooth and simple. (DESCRIBED VIDEO) On-screen visual: b-roll video of two scientist in front of a computer examining a semiconductor chip. (NARRATOR) 3M has versatile solutions for a wide range of o-ring requirements that can help you decrease your total cost of ownership by optimizing seal design, extending seal life, and easing maintenance due to reduced stiction properties. (DESCRIBED VIDEO) On-screen visual: b-roll video of a scientist in full PPE holding a semiconductor chip to camera Animated on-screen text reads: 3M optimizes our materials and support by testing with equipment designed to simulate stringent real-world conditions. (NARRATOR) We optimize our materials and support by testing with equipment designed to simulate stringent real-world conditions. (DESCRIBED VIDEO) On-screen visual: b-roll of 3M testing Animated on-screen text reads: Testing capabilities Plasma resistance Stiction force determination Metal content determination (NARRATOR) In addition to traditional elastomer characterization techniques, we have testing capabilities specific for the semiconductor market segment like plasma resistance, stiction force determination and metal content determination. (DESCRIBED VIDEO) On-screen visual: b-roll video of 3M engineer doing research and two scientists in full PPE examining a semiconductor chip. Animated on-screen text reads: Our global application engineering teams work to provide material solutions to help you achieve higher wafer yield and lower total cost of ownership. (NARRATOR) Every day, our global application engineering teams are constantly evaluating the unique and emerging needs of the semiconductor industry to help provide higher wafer yield and lower total cost of ownership. (DESCRIBED VIDEO) On-screen visual: Semiconductor chip fades in screen left over white background Animated on-screen text reads: 3M(TM) Dyneon(TM) Perfluoroelastomers & Fluoroelastomers for High Temperature Semiconductor Sealing Applications Materials Matter (DESCRIBED VIDEO) On-screen logo animation over black background reads: 3M Science. Applied to Life. ™

    Video still for 3M High Performance Sealing Material Solutions for Semiconductor Manufacturing
    3M Material Solutions for Semicon Sealing
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Together, we can help you optimize your end product designs to exact specifications, from initial polymer and catalyst selection through recipe optimization to simulation testing and confirmation. Get in touch with us today.

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