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3M high purity fluid handling materials - optimizing semiconductor production

MESSAGE A 3M EXPERT ABOUT YOUR PROJECT

Our 3M™ Dyneon™ Fluoroplastic materials are backed by decades of experience in fluoropolymer design and manufacturing and shaped by our longstanding commitment to the semiconductor industry.

High purity fluoroplastics for semiconductor fluid handling equipment

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At 3M, we are dedicated to optimizing semiconductor fluid handling solutions with 3M science (PDF, 5.3 MB).

We support leading edge semiconductor fabrication with 3M™ Dyneon™ Ultra High Purity PFA & PTFE materials to provide you with reliable and consistent performance across your facility, including helping you minimize contaminates, protecting from high temperatures and providing resistance to harsh chemicals. Additionally, 3M global application engineers are active in the semiconductor industry and are here to help you solve your toughest challenges.

Learn more about our approach

Applications for 3M™ Dyneon™ PFA and PTFE in semiconductor fluid handling

Chemical distribution systems
PFA tubing & piping

PFA valves & fittings

PTFE gaskets & seals

Anti-static PFA
Semifinished goods
PTFE & PFA sheets

PTFE & PFA films
Tanks & containment liners
PFA drums and containers

PFA & PTFE tanks & vessel liners

PFA dip tubes & dispense systems
Parts & components
PFA wafer baskets & storage racks

Anti-static PFA

PTFE wafer handling & storage

Featured product benefits

View all semiconductor fluoroplastic products

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3M™ Dyneon™ Ultra High Purity PFA
Benefits:

Excellent purity; Today meets SEMI C90-1015 with each lot tested

Excellent processability, suited for high volume manufacturing

Excellent chemical resistance

Extremely broad service temperature range

Low permeability

Exceptional surface smoothness
3M™ Dyneon™ PTFE & TFM™ Modified PTFE
Benefits:

Cost effective solution excellent for lower quantity & custom parts

High purity proven by long term acceptance in semiconductor

Extremely high flex life and stress crack resistance

Extremely broad service temperature range

Low permeability

Low coefficient of friction

Reliable material properties backed by 3M materials science

At 3M, we know that material purity is important to minimize potential contamination while protecting the semiconductor manufacturing output. Our global application engineers know these requirements and actively participate in understanding the current needs, while also looking towards the future.

Active participation in SEMI standard setting committees is one of our key strategies to help raise the industry at large, as well as ourselves, to meet the ever evolving and more stringent challenges of the future.