Semiconductor chip fluid handling

3M high purity fluid handling materials - optimizing semiconductor production


Our 3M™ Dyneon™ Fluoroplastic materials are backed by decades of experience in fluoropolymer design and manufacturing and shaped by our longstanding commitment to the semiconductor industry.

High purity fluoroplastics for semiconductor fluid handling equipment

Applications for 3M™ Dyneon™ PFA and PTFE in semiconductor fluid handling

  • chemical discribution system line drawing
    Chemical distribution systems
    • PFA tubing & piping
    • PFA valves & fittings
    • PTFE gaskets & seals
    • Anti-static PFA
  • semifinished PTFE and PFA sheet and films line drawling
    Semifinished goods
    • PTFE & PFA sheets
    • PTFE & PFA films
  • Tanks and containment liners line drawing
    Tanks & containment liners
    • PFA drums and containers
    • PFA & PTFE tanks & vessel liners
    • PFA dip tubes & dispense systems
  • semiconductor wafer carrier line drawing
    Parts & components
    • PFA wafer baskets & storage racks
    • Anti-static PFA
    • PTFE wafer handling & storage

  • Benefits:

    • Excellent purity; Today meets SEMI C90-1015 with each lot tested
    • Excellent processability, suited for high volume manufacturing
    • Excellent chemical resistance
    • Extremely broad service temperature range
    • Low permeability
    • Exceptional surface smoothness
  • Benefits:

    • Cost effective solution excellent for lower quantity & custom parts
    • High purity proven by long term acceptance in semiconductor
    • Extremely high flex life and stress crack resistance
    • Extremely broad service temperature range
    • Low permeability
    • Low coefficient of friction

  • two semiconductor lab technicians discussing fluid handling

    Reliable material properties backed by 3M materials science

    At 3M, we know that material purity is important to minimize potential contamination while protecting the semiconductor manufacturing output. Our global application engineers know these requirements and actively participate in understanding the current needs, while also looking towards the future.

    Active participation in SEMI standard setting committees is one of our key strategies to help raise the industry at large, as well as ourselves, to meet the ever evolving and more stringent challenges of the future.

Resources for use of high purity fluoroplastics in semiconductor fluid handling equipment

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