Circular disc being dipped into a bucket in a lab
High-purity semiconductor fluid handling to protect your process flow

High purity fluoroplastics for semiconductor fluid handling equipment

As the industry demands more complex chip design to power next-generation technologies including 5G devices, the need to maintain process purity becomes more critical than ever.

When you choose 3M™ Dyneon™ Fluoroplastics, you get materials with the right mix of properties to help meet the demands of many of your critical applications.  Our Ultra High Purity (UHP) PFA products can be a key raw material component for you to meet today’s stringent extractable contamination limits. What’s more, we recognize how vital consistency and dependable performance is for your materials sourcing. We are investing with a vision to continue to produce world class purity for your semiconductor manufacturing equipment – helping you reduce costly downtime and waste.

  • different shapes and sizes of clear high purity fluorothermoplastics.

    Reliable material properties backed by 3M materials science

    Our 3M™ Dyneon™ Fluoroplastics materials are backed by decades of experience in fluoropolymer design and manufacturing and shaped by our longstanding commitment to the semiconductor industry. At 3M, we are dedicated to support leading edge semiconductor fabrication with PTFE and high purity PFA materials for reliable and consistent performance across your facility, including temperature and chemical resistance. Additionally, participation in standard setting task forces is one of our key strategies to help raise the industry at large, as well as ourselves, to meet the ever evolving and more stringent challenges of the future.

Chemical Delivery Systems

Your production process comes with unique fluid handling challenges, including the presence of harsh cleaning and etching chemicals, high heat, or the need to handle ultra-pure water. Our fluorothermoplastics are engineered to withstand the toughest conditions while maintaining purity and integrity.

  • Basic shapes and profiles

    3M™ Dyneon™ PFA can be extruded or injection molded to manufacture parts such as:

    • Tubing
    • Pumps
    • Valves
    • Sheets
    • Films
  • Semifinished goods

    3M™ Dyneon™ PTFE is best suited for manufacturing compression molded parts such as:

    • Etch basins
    • Wafer carriers
    • Cleaning basins
    • Diaphragm pumps
    • Gaskets
    • Pipe lining and fittings
    • Filters

  • Lab technician using PFA for semiconductor
    • Excellent purity; Meets SEMI C90-1015 with each lot tested
    • Excellent processability, suited for high volume manufacturing
    • Excellent chemical resistance
    • Extremely broad service temperature range
    • Low permeability
    • Exceptional surface smoothness

  • PTFE and modified PTFE used in in formulation for semiconductor manufacturing
    • Cost effective solution excellent for lower quantity article manufacturing
    • High purity proven by long term acceptance in semiconductor processing equipment applications
    • Extremely high flex life and stress crack resistance
    • Extremely broad service temperature range
    • Low permeability
    • Low coefficient of friction

Connect with a 3M expert.

Need help with a tough materials challenge? Get in touch with us today for product, technical or application advice or if you want to collaborate with a 3M Technical Specialist.