3M™ CMP Pad Conditioners

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Redefining CMP Pad Conditioners

Diamond, soft brush and microreplicated CMP pad conditioners developed for your toughest semiconductor fabrication challenges.

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Consistent, Reliable CMP Pad Conditioning

In the world of semiconductor fabrication, consistency, reliability and yield are critical at every part of the process. For over 20 years, 3M™ CMP Pad Conditioners have been providing innovative pad conditioning solutions to the world’s leading semiconductor fabricators.

From the exclusive sintered abrasive diamond technology behind 3M™ Diamond Pad Conditioners to the precisely micro-replicated patterns in 3M™ Trizact™ Pad Conditioners, our global technical team is committed to continually redefining the cutting edge of pad conditioner technology. Research and manufacturing facilities around the world provide convenient product support and product supplies.


Three families of 3M™ CMP Pad Conditioners for every fabrication need

  •  PROJECT: Trizact Pad Conditioner (DESCRIBED VIDEO) On-screen visual: 3M Science. Applied to Life. logo Title graphic with gradient colored animated circuitry. On-screen text reads: 3M™ Trizact™ Pad Conditioners Micro-scale patterns, macro-scale performance Music: Shutterstock 554833 Corporate Bliss (DESCRIBED VIDEO) On-screen visual: Gradient colored animated circuitry. (NARRATOR) Ready to get consistent performance from every disk, every time? (DESCRIBED VIDEO) On-screen visual: Product shot of 3M CMP product. On-screen text reads: Metal-free surface (NARRATOR) Trizact brand CMP Pad Conditioners from 3M are used in advanced node processes sensitive to metallic contamination where precision, reliability and consistency are vital. (DESCRIBED VIDEO) On-screen visual: Two scientists hold a semiconductor chip in a clean room. On-screen text reads: Virtually complete process control (NARRATOR) 3M scientists work with semiconductor manufacturers to develop pad conditioners customized to the CMP pad in use. (DESCRIBED VIDEO) On-screen visual: Product shot of 3M CMP product. On-screen text reads: Reduced variability (NARRATOR) Everything from tip shape to height dispersion and aspect ratio can be optimized to help deliver consistent performance disk-to-disk. (DESCRIBED VIDEO) On-screen visual: Product shot of 3M CMP product. On-screen text reads: Eliminating defects caused by diamond grit scratching (NARRATOR) Using 3M’s proprietary microreplication process, aspects of 3M™ Trizact™ Pad Conditioners can be specified at the micro scale and manufactured out of diamond-coated ceramic helping avoid metallic contamination and virtually eliminating defects caused by diamond grit scratching. (DESCRIBED VIDEO) On-screen visual: Product shot of 3M CMP product. On-screen text reads: Improvement in pad wear life and defectivity (NARRATOR) Soft pads may see improvements in pad wear and life, while hard pads may see improvements in defectivity. (DESCRIBED VIDEO) On-screen visual: Gradient colored animated circuitry. (NARRATOR) Ready to redefine your pad conditioning process? (NARRATOR) Get in touch at 3M.com/CMP. (DESCRIBED VIDEO) On-screen text reads: 3M Legal Disclaimer (DESCRIBED VIDEO) On-screen visual: 3M Science. Applied to Life. Animated logo. STP : MPLS | 612.412.3771 | info@browntowndesign.com | www.browntowndesign.com

    3M™ Trizact™ CMP Pad Conditioner
    Watch: Overview of 3M™ Trizact™ CMP Pad Conditioners

    3M™ Trizact™ Pad Conditioners are designed for advanced node processes where precision, reliability and consistency are vital. Using 3M’s proprietary microreplication process, virtually every aspect from overall shape to tip shape to height dispersion can be specified at the micro scale and manufactured out of diamond-coated ceramic.
     

    • Metal-free Surface: Ideal for advanced node processes sensitive to metallic contamination.
    • Yield Improvement: Diamond-coated ceramic virtually eliminates defects associated with some diamond grit conditioners.
    • Significantly Increased Life: Consistent and predictable pad finish and pad wear disk-to-disk helps enable predictive performance.

  •  PROJECT: Diamond Pad Conditioner (DESCRIBED VIDEO) On-screen visual: 3M Science. Applied to Life. logo Title graphic with gradient colored animated circuitry. On-screen text reads: 3M™ Diamond Pad Conditioners Reliable pad conditioning performance (DESCRIBED VIDEO) On-screen visual: Gradient colored animated circuitry. (NARRATOR) Ready to get more out of each of your CMP pad conditioners? (DESCRIBED VIDEO) On-screen visual: Product shot of 3M CMP product. On-screen text reads: 3M™ Diamond Pad Conditioners (NARRATOR) For 20 years, 3M scientists have been improving and refining our diamond pad conditioners to support some of the industry’s toughest process challenges. (DESCRIBED VIDEO) On-screen visual: Product shot of 3M CMP product. Close up of diamond technology. On-screen text reads: Firmly secured diamonds Increased pad life (NARRATOR) 3M™ Diamond Pad Conditioners’ diamonds are firmly secured with 3M’s proprietary sintered abrasive technology to help improve disk life and reduce defects. (DESCRIBED VIDEO) On-screen visual: Two scientists in a lab looking at a computer screen. Product shot of 3M CMP product. On-screen text reads: Controlled performance (NARRATOR) Plus, thanks to controlled spacing and protrusion, each conditioner has excellent planarity and delivers stable and consistent process performance. (DESCRIBED VIDEO) On-screen visual: Earth from space. On-screen text reads: Responsive support and supply (NARRATOR) Multiple geographically independent 3M manufacturing and research facilities around the world provide prompt, local technical support, and supply. (DESCRIBED VIDEO) On-screen visual: Gradient colored animated circuitry. (NARRATOR) Choose from our extensive library of diamond pad conditioners or customize your own. (NARRATOR) Get in touch at 3M.com/CMP. (DESCRIBED VIDEO) On-screen text reads: 3M Legal Disclaimer (DESCRIBED VIDEO) On-screen visual: 3M Science. Applied to Life. Animated logo. STP : MPLS | 612.412.3771 | info@browntowndesign.com | www.browntowndesign.com

    3M™ Diamond Pad Conditioner
    Watch: Overview of 3M™ Diamond Pad Conditioners

    3M™ Diamond Pad Conditioners refresh your CMP pad surfaces, minimize wear, and maintain consistent asperities and consistent pad performance – for wafer after wafer. Their single-layered diamond grid with highly controlled spacing helps enable you to better predict and optimize your CMP pad usage, for better planarization efficiency.
     

    • Controlled Performance: Diamond spacing and protrusion results in excellent pad planarity.
    • Increased Life: Diamonds are firmly secured with 3M’s proprietary sintered abrasive technology and protected by an edge exclusion zone.
    • Customizable: Adjust for your preferred conditioning aggressiveness.

  •  PROJECT: 05 Pad Conditioner Brush (DESCRIBED VIDEO) On-screen visual: 3M Science. Applied to Life. logo Title graphic with gradient colored animated circuitry. On-screen text reads: 3M™ CMP Pad Conditioner Brushes Pad cleaning and gentle conditioning Music: Shutterstock 554833 Corporate Bliss (DESCRIBED VIDEO) On-screen visual: Gradient colored animated circuitry. (NARRATOR) Ready to redefine your brush conditioning and cleaning process? (DESCRIBED VIDEO) On-screen visual: Product shot of 3M CMP product. On-screen text reads: 3M’s proprietary non-tufted brush making technology (NARRATOR) 3M brand Pad Conditioner Brushes offer 3M’s proprietary non-tufted brush technology, (DESCRIBED VIDEO) On-screen visual: Graphic representation of 3M CMP product brush. On-screen text reads: Strong bristles 3M™ CMP Pad Conditioner Brush Tufted bristle brush (NARRATOR) Where each bristle is independently anchored and evenly distributed across the brush surface to prevent particle collection and to improve bristle retention. (DESCRIBED VIDEO) On-screen visual: Product shot of 3M CMP product. On-screen text reads: Great for soft CMP pads (NARRATOR) These strong bristles remove pad debris from porometric and felt-based pads, (DESCRIBED VIDEO) On-screen visual: Product shot of 3M CMP product. On-screen text reads: Durable and metal-free (NARRATOR) and the metal-free polymer eliminates metal contamination and provides corrosion resistance. (DESCRIBED VIDEO) On-screen visual: Two scientist in a lab. On-screen text reads: Low cost buffing and cleaning (NARRATOR) Used in CMP buff and pad cleaning applications, these pads offer easy connection to polishing tool end effector and efficient pad cleaning and slurry distribution. (DESCRIBED VIDEO) On-screen visual: Earth from space. On-screen text reads: Global supply and support (NARRATOR) 3M’s research and manufacturing facilities around the world provide global capabilities, convenient technical support, and a dependable source of supply to support your process needs. (DESCRIBED VIDEO) On-screen visual: Gradient colored animated circuitry. (NARRATOR) Ready for a new way of pad conditioning and cleaning? (DESCRIBED VIDEO) On-screen visual: Gradient colored animated circuitry. (NARRATOR) Get in touch at 3M.com/CMP. (DESCRIBED VIDEO) On-screen text reads: 3M Legal Disclaimer (DESCRIBED VIDEO) On-screen visual: 3M Science. Applied to Life. Animated logo. STP : MPLS | 612.412.3771 | info@browntowndesign.com | www.browntowndesign.com

    3M™ CMP Pad Conditioner Brush
    Watch: Overview of 3M™ CMP Pad Conditioner Brushes

    Featuring a metal-free construction and low cost of ownership, 3M™ CMP Pad Conditioner Brushes are used for CMP buff and pad cleaning applications.
     

    • Durable and Metal-free: Using 3M’s proprietary brush making technology, bristles are independently anchored and evenly distributed across the brush surface.
    • Great for Soft CMP Pads: Strong bristles remove pad debris from porometric and felt-based pads.
    • Low Cost of Ownership: Efficient pad cleaning and slurry distribution.

Find a CMP pad conditioner to match your CMP pads

Already have a CMP pad in use? We have many available pad conditioner variations for hard and soft pads, advanced node processes and more. Find the perfect balance of performance, price and other key pad conditioner properties for your process. Download our full product family guide (PDF, 344.13 KB).


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