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  6. 3M™ Betapure™ AUL Series Filter Cartridge AUL10Z15UCSF5, 10 in, SOE, EPR, 30/Case

3M™ Betapure™ AUL Series Filter Cartridge AUL10Z15UCSF5, 10 in, SOE, EPR, 30/Case

Part Number AUL10Z15UCSF53M ID 70020348879UPC 000511259916363M Product Number AUL10Z15UCSF5
    • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
    • Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
    • The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration
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    Specifications
    Attribute Name
    Value
    Brand
    Betapure™
    End Modification
    222/Flat Cap
    Filter Technology
    Non-woven
    Filter Type
    Depth
    Gasket/O-ring Material
    EPR, EPR
    Industries
    Industrial
    Maximum Operating Temperature (Celsius)
    80 Degree Celsius
    Maximum Operating Temperature (Fahrenheit)
    175 Degree Fahrenheit
    Micron Rating
    0.05 μm
    Overall Diameter (Imperial)
    2.92 in
    Overall Diameter (Metric)
    7.42 cm
    Overall Length (Imperial)
    10 in
    Overall Length (Metric)
    25.4 cm
    Product Series
    AUL
    Series
    Betapure™ AUL Series
    Units per Case
    30
    Product Details
    • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
    • Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
    • The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration

    3M™ Betapure™ AUL Series Filter Cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring bi-component fiber technology with targeted multizone filtration layers to enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

    3M™ Betapure™ AUL Series filter cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring 3M’s bi-component fiber technology with targeted multi-zone filtration layers enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

    Our filter is specifically designed to have a rigid filter structure which retains consistent pore size even under intermittent process conditions. Changes such as those caused by pump fluctuations, stopping and restarting the system, or high differential pressure will have minimal, if any effect on product consistency. Depth filtration reduces LPCs, and provides superior classification of slurry particles to help minimize scratching and chatter marks.

    The targeted multi-zone construction optimizes both LPC reduction and enhanced flow characteristics, including extremely low pressure drop, to minimize shearing of the slurry while providing superior service life.

    3M™ Betapure™ AUL Series Filter Cartridges are available in 5”, 10”, 20”, and 30” lengths with 222 connector, flat cap, and EPR o-rings, and in a 10” double open-end filter with polyethylene foam end caps.