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  6. 3M™ Betapure™ AUL Series Filter Cartridge AUL30Z13FC007, 30 in, .7 um ABS, 222, EPR, 15/Case

3M™ Betapure™ AUL Series Filter Cartridge AUL30Z13FC007, 30 in, .7 um ABS, 222, EPR, 15/Case

Part Number AUL30Z13FC0073M ID 70020323914UPC 000540079823643M Product Number AUL30Z13FC007
  • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
  • Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
  • The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration
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Specifications
Attribute Name
Value
Application
Chemical Mechanical Planarization (CMP), Electronics
Brand
Betapure™
End Configuration
222 O-Ring & Flat Cap
End Modification
222 connector, flat cap and EPR o-rings.
Filter Material
Polyethylene: Polypropylene Bi-component Fiber & Glass Fiber
Filter Technology
Non-woven
Filter Type
Depth
Gasket/O-ring Material
EPR, EPR
Industries
Industrial
Maximum Operating Temperature (Celsius)
80 Degree Celsius
Maximum Operating Temperature (Fahrenheit)
176 Degree Fahrenheit
Micron Rating
70 μm
Overall Diameter (Imperial)
2.92 in
Overall Diameter (Metric)
7.42 cm
Overall Length (Imperial)
30 in
Overall Length (Metric)
76.2 cm
Overall Width (Imperial)
2.92 in
Overall Width (Metric)
7.416 cm
Product Series
AUL
Segment
Electronics
Series
Betapure™ AUL Series
Size (Imperial)
2.92 in x 30 in
Size (Metric)
7.416 cm x 76.2 cm
Units per Case
15
Product Details
  • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
  • Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
  • The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration

3M™ Betapure™ AUL Series Filter Cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring bi-component fiber technology with targeted multizone filtration layers to enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

3M™ Betapure™ AUL Series filter cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring 3M’s bi-component fiber technology with targeted multi-zone filtration layers enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

Our filter is specifically designed to have a rigid filter structure which retains consistent pore size even under intermittent process conditions. Changes such as those caused by pump fluctuations, stopping and restarting the system, or high differential pressure will have minimal, if any effect on product consistency. Depth filtration reduces LPCs, and provides superior classification of slurry particles to help minimize scratching and chatter marks.

The targeted multi-zone construction optimizes both LPC reduction and enhanced flow characteristics, including extremely low pressure drop, to minimize shearing of the slurry while providing superior service life.

3M™ Betapure™ AUL Series Filter Cartridges are available in 5”, 10”, 20”, and 30” lengths with 222 connector, flat cap, and EPR o-rings, and in a 10” double open-end filter with polyethylene foam end caps.