1. United States
  2. All 3M Products
  3. Filtration & Separation
  4. Filter Cartridges & Media
  5. Cylindrical Depth Filter Cartridges
  6. 3M™ Betapure™ AUL Series Filter Cartridge AUL09Z13NG007, 9 3/4 in, .7 um ABS, DOE, 30/Case

3M™ Betapure™ AUL Series Filter Cartridge AUL09Z13NG007, 9 3/4 in, .7 um ABS, DOE, 30/Case

Part Number AUL09Z13NG0073M ID 70020323880UPC 000540079823333M Product Number AUL09Z13NG007
  • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
  • Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
  • The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration
 More...
View all details
Specifications
Attribute Name
Value
Application
Chemical Mechanical Planarization (CMP), Electronics
Brand
Betapure™
End Configuration
Double Open End (DOE)
End Modification
Double Open End, with Valora Polyolefin Foam end caps.
Filter Material
Polyethylene: Polypropylene Bi-component Fiber & Glass Fiber
Filter Technology
Non-woven
Filter Type
Depth
Gasket/O-ring Material
Polyethylene, Polyethylene
Industries
Industrial
Maximum Operating Temperature (Celsius)
80 Degree Celsius
Maximum Operating Temperature (Fahrenheit)
176 Degree Fahrenheit
Micron Rating
70 μm
Overall Diameter (Imperial)
2.92 in
Overall Diameter (Metric)
7.42 cm
Overall Length (Imperial)
9.75 in
Overall Length (Metric)
24.765 cm
Product Series
AUL
Segment
Electronics
Series
Betapure™ AUL Series
Units per Case
30
Product Details
  • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
  • Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
  • The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration

3M™ Betapure™ AUL Series Filter Cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring bi-component fiber technology with targeted multizone filtration layers to enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

3M™ Betapure™ AUL Series filter cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring 3M’s bi-component fiber technology with targeted multi-zone filtration layers enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

Our filter is specifically designed to have a rigid filter structure which retains consistent pore size even under intermittent process conditions. Changes such as those caused by pump fluctuations, stopping and restarting the system, or high differential pressure will have minimal, if any effect on product consistency. Depth filtration reduces LPCs, and provides superior classification of slurry particles to help minimize scratching and chatter marks.

The targeted multi-zone construction optimizes both LPC reduction and enhanced flow characteristics, including extremely low pressure drop, to minimize shearing of the slurry while providing superior service life.

3M™ Betapure™ AUL Series Filter Cartridges are available in 5”, 10”, 20”, and 30” lengths with 222 connector, flat cap, and EPR o-rings, and in a 10” double open-end filter with polyethylene foam end caps.