Attribute Name
|
Value
|
---|---|
Abrasive Material
|
Nickel based alloy with patterned diamond
|
Abrasive Working Surface
|
Full Face
|
Aggressiveness
|
15-19
|
Application
|
CMP
|
Carrier Color
|
Black
|
Carrier Diameter (Imperial)
|
4.25 in
|
Carrier Diameter (Metric)
|
107.95 mm
|
Carrier Form
|
Disc
|
Carrier Format
|
Disk - with bevel edge
|
Carrier Material
|
Polycarbonate
|
Carrier Size
|
4.25 inch diameter
|
Carrier Substrate
|
Polycarbonate
|
Diamond Size
|
251 um
|
Diamond Type
|
Type 4, semi-sharp
|
Manufacturing Location
|
Singapore
|
Product Type
|
Diamond Pad Conditioner
|
3M™ Diamond Pad Conditioners are highly engineered chemical mechanical planarization (CMP) pad conditioners that deliver reliable performance for critical semiconductor CMP applications.
Refresh your CMP pad surfaces with 3M™ Diamond Pad Conditioners. They also minimize wear and maintain consistent asperities and consistent pad performance — for wafer after wafer. CMP pad conditioners from 3M utilize sintered abrasive technology for excellent diamond retention for longer life, with controlled diamond placement and protrusion. Their single-layered diamond grid with highly controlled spacing enables you to better predict and optimize your CMP pad usage, for better planarization efficiency.
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