3M™ LifeASSURE™ PSN Series Filter Cartridge

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Low-amine nylon membrane for filtration of photoresist chemicals

Advanced Pleat Technology (APT) provides increased membrane area and a low operating and differential pressure

High reduction of gel particles for reduced defectivity

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Tech Data Sheet (PDF, 563KB)

Details

Highlights
  • Low-amine nylon membrane for filtration of photoresist chemicals
  • Advanced Pleat Technology (APT) provides increased membrane area and a low operating and differential pressure
  • High reduction of gel particles for reduced defectivity
  • Naturally hydrophilic Nylon 6,6 membrane reduces chemical usage since no pre-wetting or flushing is required and reduces potential for micro-bubble formation by not de-wetting in outgassing fluids
  • High-purity applications with low cartridge extractables

3M™ LifeASSURE™ PSN Series Filter Cartridges are naturally hydrophilic, low-amine, Nylon 6,6 pleated membrane filters that are rinsed with 18-MegaOhm water, providing low extractable and high flow rates with low-pressure drop in an all-high density polyethylene construction. They are designed to meet the exacting requirements of photoresist and ancillary chemical filtration applications.

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3M™ LifeASSURE™ PSN Series Filter Cartridge

Increased efficiency. Reduced total operating costs.

3M™ LifeASSURE™ PSN Series Filter Cartridges are ideally suited for photoresist and ancillary chemical filtration applications that require high-efficiency contaminant reduction at 0.04, 0.1 or 0.2μm. These hydrophilic, low-amine, nylon membranes provide high purity and increased efficiency while reducing costs. Filter cartridges are manufactured, rinsed with 18-MegaOhm water, dried and bagged in a clean environment under an ISO-certified quality system

  • 30 degree angle with arrow pointing to the left
    Naturally hydrophilic Nylon 6,6 pleated membrane.

    3M™ LifeASSURE™ PSN Series Filter Cartridges provide low extractables and high flow rates with low pressure drop. Since no pre-wetting or flushing is required, these filters reduce chemical usage and the potential for micro-bubble formation by not de-wetting in outgassing fluids

  • Advanced pleat technology showing open space between filter pleats
    Advanced Pleat Technology (APT).

    3M’s APT provides an increased membrane area and a low operating and differential pressure.

  • Water droplets passing through filter
    Absolute-rated.

    3M™ LifeASSURE™ PSN Series Filter Cartridges offer particle reduction ratings of 0.04, 0.1 and 0.2μm.

  • Arrow pointing downward on top of stacks of money
    Reduced costs.

    Thanks to reduced energy consumption, pump wear and labor, you can expect a lower cost of ownership.

3M™ LifeASSURE™ PSN Series Filter Cartridges are constructed with a high-efficiency, naturally hydrophilic, Nylon 6,6 membrane. The cage, core, end cap and membrane supports are made of high-density polyethylene (HDPE), which has low extractables. All capsule components are made of polypropylene. Vent O-rings are available in fluorocarbon and EPR. No adhesives, binders or surfactants are used in the manufacturing process. Filter cartridges are manufactured and double-bagged in a clean environment under an ISO-certified quality system.

Suggested applications
  • Photoresist chemicals requiring low charge
  • Compatible with nylon
  • High-purity chemicals
  • 193nm Photoresists
  • I-line and G-line Photoresists
  • Alcohols
  • Bases

Specifications

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