3M™ Betapure™ AUL Series Filter Cartridge

3M™ Betapure™ AUL Series filter cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring 3M’s bi-component fiber technology with targeted multi-zone filtration layers enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

Our filter is specifically designed to have a rigid filter structure which retains consistent pore size even under intermittent process conditions. Changes such as those caused by pump fluctuations, stopping and restarting the system, or high differential pressure will have minimal, if any effect on product consistency. Depth filtration reduces LPCs, and provides superior classification of slurry particles to help minimize scratching and chatter marks.

The targeted multi-zone construction optimizes both LPC reduction and enhanced flow characteristics, including extremely low pressure drop, to minimize shearing of the slurry while providing superior service life.

3M™ Betapure™ AUL Series Filter Cartridges are available in 5”, 10”, 20”, and 30” lengths with 222 connector, flat cap, and EPR o-rings, and in a 10” double open-end filter with polyethylene foam end caps.