3M™ Betapure™ AUL Series Filter Cartridge

20  Products
  • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
  • Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
  • The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration
 More...
View all details
Overall Diameter (Imperial)
Overall_Diameter_Imperial
Overall Length (Imperial)
Overall_Length_Imperial
Micron Rating
Micron_Rating
Overall Width (Imperial)
Overall_Width_Imperial
End Modification
End_Modification
20 Products Available
Available options:
 Overall Diameter (Imperial), Overall Length (Imperial), Micron Rating, Overall Width (Imperial) and End Modification
All Options
Close
Specifications
Attribute Name
Value
Application
Chemical Mechanical Planarization (CMP), Electronics
Brand
Betapure™
End Modification
222 connector, flat cap and EPR o-rings., Double Open End, with Valora Polyolefin Foam end caps.
Filter Material
Polyethylene: polypropylene bi-component fiber and glass fiber
Filter Technology
Non-woven
Filter Type
Depth
Gasket/O-ring Material
EPR, Valora Polyolefin Foam end caps
Industries
Industrial
Maximum Operating Temperature (Celsius)
40 Degree Celsius
Maximum Operating Temperature (Fahrenheit)
104 Degree Fahrenheit
Micron Rating
0.7 Absolute, @ 95%, 0.7 μm
Overall Diameter (Imperial)
2.5 in, 2.92 in
Overall Diameter (Metric)
6.35 cm, 7.42 cm
Overall Length (Imperial)
10 in, 20 in, 30 in, 5 in
Overall Length (Metric)
12.7 cm, 25.4 cm, 50.8 cm, 76.2 cm
Overall Width (Imperial)
2.92 in
Overall Width (Metric)
7.416 cm
Series
Betapure™ AUL Series
Units per Case
15, 30
Product Details
  • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
  • Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
  • The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration

3M™ Betapure™ AUL Series Filter Cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring bi-component fiber technology with targeted multizone filtration layers to enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

3M™ Betapure™ AUL Series filter cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring 3M’s bi-component fiber technology with targeted multi-zone filtration layers enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

Our filter is specifically designed to have a rigid filter structure which retains consistent pore size even under intermittent process conditions. Changes such as those caused by pump fluctuations, stopping and restarting the system, or high differential pressure will have minimal, if any effect on product consistency. Depth filtration reduces LPCs, and provides superior classification of slurry particles to help minimize scratching and chatter marks.

The targeted multi-zone construction optimizes both LPC reduction and enhanced flow characteristics, including extremely low pressure drop, to minimize shearing of the slurry while providing superior service life.

3M™ Betapure™ AUL Series Filter Cartridges are available in 5”, 10”, 20”, and 30” lengths with 222 connector, flat cap, and EPR o-rings, and in a 10” double open-end filter with polyethylene foam end caps.