3M™ Betapure™ AUL Series Filter Capsules

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Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification

Bi-component fiber technology with targeted multizone filtration layers enables Large Particle Count (LPC) reduction

Rigid filter structure maintains pore size even under intermittent process conditions for consistent filtration

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  • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
  • Bi-component fiber technology with targeted multizone filtration layers enables Large Particle Count (LPC) reduction
  • Rigid filter structure maintains pore size even under intermittent process conditions for consistent filtration

3M™ Betapure™ AUL Series Filter Capsules contain 3M™ Betapure AUL filters that represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields.

3M™ Betapure™ AUL Series Filter Capsules represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. 3M bi-component fiber technology with targeted multi-zone filtration layers enables Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes. Our filter is specifically designed to have a rigid filter structure which retains consistent pore size even under intermittent process conditions. Changes such as those caused by pump fluctuations, stopping and restarting the system, or high differential pressure will have minimal, if any, effect on product consistency.  Depth filtration reduces LPCs and provides superior classification of slurry particles to help minimize scratching and chatter marks. The targeted multi-zone construction optimizes both LPC reduction and enhanced flow characteristics, including extremely low pressure drop, to minimize shearing of the slurry while providing superior service life.

3M™ Betapure™ AUL Series Filter capsules are available in 5” or 10” nominal lengths with Flaretek® or NPT fittings.

FLARETEK® is a trademark of Entegris, Inc

A History of Innovation
For more than a century, 3M has applied innovation and technology to improve customers’ lives and support their business goals. From its headquarters in St. Paul, Minnesota, 3M serves industrial and commercial customers and consumers in nearly 200 countries. Across thousands of products, the 3M brand represents consistency, superior quality, and value. The 3M success begins with a culture of creative collaboration that inspires a never-ending stream of powerful technologies and product solutions that make life better. 3M has an ability to apply technologies – often in combination – to an endless array of real-world customer needs. Of course, all of this is made possible by the people of 3M and a singular commitment to make life easier and better for people around the world. Toward that end, 3M is committed to providing innovative, cost-effective products that help protect people, equipment and the environment. 3M Purification Inc. (formerly CUNO Incorporated) provides filtration and separation solutions for residential, foodservice, science labs, industrial, marine and other applications.

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