Close  

Contact Us about 3M™ Liqui-Cel™

Thank you for your interest in 3M™ Liqui-Cel™ products. Please complete the form below and someone will be in touch with you soon.

* indicates required information to process form.








  • Sizing Information

    (ex: Microelectronics O2 Removal)

  • (If other, please specify)











  • (Required for CO2 Sizing):

  • We will only use this information to respond to your request and as further described in our 3M Privacy Policy.

    Please be aware that this information (including the original and the subsequent reply) may be transferred to a server located in the U.S. for metrics and storage. If you do not consent to this use of your personal information, please do not use the Contact Us system.

  • Submit
Thank You!

Your request has been submitted and our goal is to respond to your request within 24-48 hours.


Apologies!

An error has occurred.


webLoaded = "false" Loadclientside=No
3M™ Liqui-Cel™ Membrane Contactors for Semiconductor and Microelectronics mesh banner hero image

3M™ Liqui-Cel™ Membrane Contactors for Semiconductor and Microelectronics

Ask A 3M Expert
webLoaded = "false"
  • As semiconductor processing, flat panel display manufacturing and other high-technology industries move to smaller line widths, larger wafer sizes and advancing display technology dissolved gas control is a critical consideration in ultra-pure water quality.

    Because of their efficiency, simplicity and high gas removal performance, 3M™ Liqui-Cel™ Membrane Contactors are considering the benchmark in the degassing technology in the semiconductor and flat panel display process water treatment systems. They have low extractables and do not negatively impact water quality. With proper system design, these membrane degassers remove O₂ from water down to less than 1 ppb and dissolved CO₂ to 0.5 ppm. Low dissolved oxygen levels protect product yields, while low CO₂ levels may help maximize the efficiency of electrodionization (EDI) and other ion exchange processes.

    Unlike conventional vacuum towers these membrane degasser systems can be expanded. As water volume requirements grow or dissolved gas specifications get lower additional contactors can be added to a system to meet the changing needs.

    Liqui-Cel membrane contactors also enable low concentrations and precision control of the dissolved gases in ultra-pure water and other compatible wet bench processes fluids.


webLoaded = "false"

Dissolved Gas Control – Featured Products for Semiconductor & Microelectronics

  • 3M™ Liqui-Cel™ EXF-10x28 Series Membrane Contactor Product Photo

    3M™ Liqui-Cel™ EXF-10x28 Series Membrane Contactor for high purity water polishing loops

  • 3M™ Liqui-Cel™ EXF-14x28 Series Membrane Contactor Product Photo

    3M™ Liqui-Cel™ EXF-14x28 Series Membrane Contactor for make-water loops

  • 3M™ Liqui-Cel™ 4x13 SP Series Membrane Contactor Product Photo

    3M™ Liqui-Cel™ 4x13 SP Series Membrane Contactors for wet bench process solutions


Load Client Side - No
Web Loaded - false
UUID - 8f310ac5-7560-45ba-8978-f08d68a7606d

Resources for Gas Transfer Membranes in Microelectronics & Semiconductor

Data Sheets
Product Drawings

2.5x8 Product Drawings
 

4x13 Product Drawings
 

4x28 Product Drawings
 

6x28 Product Drawings
 

10x28 Product Drawings
 

14x28 Product Drawings
 

14x40 Product Drawings
 

Generic System P&IDs
Operating and Technical Guides
Publications and Case Studies

webLoaded = "false" Loadclientside=No
Need help with product selection, system sizing or questions about the technology?
3M Separation and Purification Sciences Division
13840 South Lakes Dr.
Charlotte, NC 28273 USA
Phone: + 1 980 859 5400
Fax: + 1 980 859 5258
3M Separation and Purification Sciences Division
13840 South Lakes Dr.
Charlotte, NC 28273 USA
Phone: + 1 980 859 5400
Fax: + 1 980 859 5258

3M Deutschland GmbH
Öhder Straße 28
42289 Wuppertal Germany
Phone: +49 202 6099 - 0
Fax: +49 202 6099 - 750

3M Deutschland GmbH
Öhder Straße 28
42289 Wuppertal Germany
Phone: +49 202 6099 - 0
Fax: +49 202 6099 - 750

Follow Us