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Membranes for diverse process streams.

Find microfiltration membranes that provide a high-performance balance of retention and liquid flow rate in microelectronics filtration devices.

Microporous membranes for microelectronic and semiconductor filtration.

Fluid purity is critical to important fabrication processes such as wet etch and clean, photolithography and chemical mechanical planarization. As these fabrication processes continue to shrink, capturing particles in the nanometer range becomes ever more important. At the same time, contaminant concentrations are rising along with increasingly strict regulations. It’s a situation that requires a multi-stage filtration process—one that 3M microfiltration membranes can help streamline.

In microelectronics, microfiltration membranes remove particles of different class sizes. No matter the application, 3M membranes help filters prevent contamination. They are a critical component of fluid stream filters for semiconductor chip manufacturing, pre-filtering ultra pure water streams and process fluid filtration in LCD TFT manufacturing. No matter the application, expect high-performance filtration when integrating a 3M membrane in your product.


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    A varied and versatile membrane portfolio.

    With advanced manufacturing capabilities and decades of expertise across industries, 3M has developed an expansive membrane product portfolio. Our OEM customers work closely with 3M application engineers to help them meet their objectives efficiently and effectively. Finding the appropriate membrane for your application is a seamless process with 3M experts by your side.

    3M capillary and flat sheet membranes provide:
     

    • Reliable quality
    • Wide range of products and pore sizes
    • Batch-to-batch consistency
    • Performance helps extend filter life
    • High flow rate and flux performance

    Whether you’re designing filtration devices for single or multiple use applications, 3M is here to help you scale
    your processes with confidence at every stage of development.


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Consult with an expert for more membrane material information and application options.

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Consistent, high-quality solutions you can count on.

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    Diverse Portfolio

    There is high diversity among microelectronic device manufacturing applications. A large range of membrane pore sizes makes it easy to find one that suits your process.

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    Proven Performance

    In filtration, a foundation in science goes a long way. While 3M membranes perform on a micro scale, their impact on reliable manufacturing has been remarkable.

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    Standards Compliance

    Microelectronics manufacturing brings unique environmental requirements. A notable consideration is removing particles and other impurities. 3M can help you align to these standards.

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    Trusted Expertise

    Leveraging experience across many industries, 3M delivers consistent membrane product performance for high-stakes applications on a global scale.


Membrane technology with functional structures.

Microporous membranes incorporate diverse physical properties for filtration modules. Whether your use case relates to lab testing or product development, crossflow or dead-end process streams, 3M membranes are designed to align with your unique goals.

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    Polyethersulfone (PES) Membrane Technology Platform

    Advanced production technology facilitates the development of self-supporting PES membranes. By casting an asymmetrical or even highly asymmetrical pore structure using the SIPS process, 3M produces a reliable portfolio of microfiltration membrane solutions across multiple proven product lines.

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    Polypropylene (PP) Membrane Technology Platform

    PP hydrophobic polyolefin membranes are produced using a TIPS process. As a result of this sophisticated manufacturing procedure, 3M™ MF-PP Capillary Membranes provide high porosity combined with uniform pore distribution throughout the thickness of the membrane.

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    Polyamide (PA) Membrane Technology Platform 

    PA hydrophilic membranes chemically resist alkaline solutions and organic solvents. 3M™ MICROLON™ Flat Sheet Membranes help remove particulate from a wide range of fluids, such as those found in photolithographic liquids.


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Connect with membrane specialists.

We work directly with global customers to make choosing the appropriate membrane material easier. Consult with a 3M expert to learn more about various solutions from our extensive portfolio.

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