1. All 3M Products

3M™ Trizact™ Pad Conditioner, B75-2990-5S2, 4.25-in dia

Part Number B75-29903M ID 60020021352UPC 00051111901458
  • Precisely engineered 3D microreplicated ceramic structures coated with CVD diamond
  • Accurately controlled microreplicated structures
  • Consistent performance disk-to-disk and the metal-free cutting surface
  • Ideal for advanced node processes sensitive to metallic contamination
 More...
Specifications
Attribute Name
Value
Abrasive Working Surface
B75-2990 pattern
Application
CMP
Brand
Trizact™
Carrier Color
Gray
Carrier Format
Stainless steel carrier - with universal mouting configuration
Carrier Material
304 Stainless Steel
Carrier Size
4.25 inch diameter
Carrier Substrate
304 SS
CMP Process
AL
Mineral Type
CVD coated ceramic
Product Series
B75-2990
Product Type
Diamond Pad Conditioner
TDS Required
Yes
Product Details
  • Precisely engineered 3D microreplicated ceramic structures coated with CVD diamond
  • Accurately controlled microreplicated structures
  • Consistent performance disk-to-disk and the metal-free cutting surface
  • Ideal for advanced node processes sensitive to metallic contamination

Bringing together 3M’s know-how in abrasives, ceramics and microreplication, the 3M™ Trizact™ Pad Conditioner B75-2990 is an innovative pad conditioner for Chemical Mechanical Polishing (CMP) for advanced node semiconductor manufacturing.

Follow Us
The brands listed above are trademarks of 3M.
Change Location
United States - English