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3M™ Diamond Pad Conditioner S98, 4 inch Diameter

Part Number S983M ID 60020016329UPC 00051111724057
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for superior retention
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Specifications
Attribute Name
Value
Abrasive Working Surface
Full Face
Aggressiveness
8-14
Application
CMP
Carrier Color
Gray
Carrier Format
Disk - with bevel edge
Carrier Size
4.00 inch diameter
Carrier Substrate
410 SS
CMP Process
STI Process
Diamond Size
90 um
Diamond Type
Type 3, semi blocky
Manufacturing Location
United States
Mineral Type
Nickel based alloy with patterned diamond
Product Series
S98
Product Type
Diamond Pad Conditioner
TDS Required
Yes
Product Details
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for superior retention

Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for superior diamond retention, with controlled diamond placement and protrusion.

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