1. All 3M Products

3M™ Diamond Pad Conditioner S82, 4-in dia

Part Number S823M ID 60020013193UPC 00051111700839
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for great retention
 More...
Specifications
Attribute Name
Value
Abrasive Working Surface
Full Face
Aggressiveness
9-10
Application
CMP
Brand
3M™
Carrier Color
Gray
Carrier Format
Disk
Carrier Material
410 Stainless Steel
Carrier Size
4.00 inch diameter
Carrier Substrate
410 SS
CMP Process
Cu (barrier)
Diamond Size
74 um
Diamond Type
Type 2, blocky
Manufacturing Location
United States
Mineral Type
Nickel based alloy with patterned diamond
Product Series
S82
Product Type
Diamond Pad Conditioner
TDS Required
Yes
Product Details
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for great retention

Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for excellent diamond retention, with controlled diamond placement and protrusion.

Follow Us
The brands listed above are trademarks of 3M.
Change Location
United States - English