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3M™ Diamond Pad Conditioner S122, 4 inch Diameter

Part Number S1223M ID XA004102381
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for superior retention
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Specifications
Attribute Name
Value
Abrasive Working Surface
Full Face
Aggressiveness
9-16
Application
CMP
Carrier Color
Gray
Carrier Format
Disk
Carrier Size
4.00 inch diameter
Carrier Substrate
410 SS
CMP Process
Cu (bulk), PMD/ILD, STI Process, W (bulk)
Diamond Size
151 um
Diamond Type
Type 3, semi blocky
Manufacturing Location
Singapore
Mineral Type
Nickel based alloy with patterned diamond
Product Series
S122
Product Type
Diamond Pad Conditioner
TDS Required
Yes
Product Details
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for superior retention

Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for superior diamond retention, with controlled diamond placement and protrusion.

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