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3M™ Diamond Pad Conditioner Ring E3921, 360 mm Diameter

Part Number E39213M ID 60020020917UPC 00051111901045
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for superior retention
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Specifications
Attribute Name
Value
Abrasive Working Surface
Segmented
Application
CMP
Carrier Color
Gray
Carrier Format
Ring
Carrier Size
14.17 inch diameter
Carrier Substrate
304 SS
CMP Process
Cu (bulk), PMD/ILD, W (bulk)
Diamond Size
251 um
Diamond Type
Type 8, sharp
Manufacturing Location
United States
Mineral Type
Nickel based alloy with patterned diamond
Product Series
E3921
Product Type
Diamond Pad Conditioner Ring
TDS Required
Yes
Product Details
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for superior retention

Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for superior diamond retention, with controlled diamond placement and protrusion.

Legal Disclaimer

Product Disclaimer
  • Use of pad conditioners in process is pad dependent. Additional processes may be supported, contact 3M lab to verify product recommendations
  • The technical information and data shown on this page should be considered representative or typical only and should not be used for specification purposes
  • 3M products shown on this website may not be available in all geographic regions or may not be available at this time. Please contact your local sales representative to determine product availability.

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