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3M™ Diamond Pad Conditioner Ring E3920, 360-mm dia

Part Number E39203M ID 60020020263UPC 00051111900314
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for great retention
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Specifications
Attribute Name
Value
Abrasive Working Surface
Segmented
Aggressiveness
150-170
Application
CMP
Brand
3M™
Carrier Color
Gray
Carrier Format
Ring
Carrier Material
304 Stainless Steel
Carrier Size
14.17 inch diameter
Carrier Substrate
304 SS
CMP Process
Cu (bulk), PMD/ILD, W (bulk)
Diamond Size
251 um
Diamond Type
Type 8, sharp
Manufacturing Location
United States
Mineral Type
Nickel based alloy with patterned diamond
Product Series
E3920
Product Type
Diamond Pad Conditioner Ring
TDS Required
Yes
Product Details
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for great retention

Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for excellent diamond retention, with controlled diamond placement and protrusion.

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