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3M™ Diamond Pad Conditioner Ring E187, 260-mm dia

Part Number E1873M ID 60020012419UPC 00051111700044
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for great retention
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Specifications
Attribute Name
Value
Abrasive Material
Nickel based alloy with patterned diamond
Abrasive Working Surface
Segmented
Aggressiveness
70-90
Application
CMP
Brand
3M™
Carrier Color
Gray
Carrier Diameter (Imperial)
10.236 in
Carrier Diameter (Metric)
260 mm
Carrier Form
Ring
Carrier Format
Ring
Carrier Material
304 Stainless Steel
Carrier Size
10.24 inch diameter
Carrier Substrate
304 SS
Diamond Size
181 um
Diamond Type
Type 4, semi-sharp
Manufacturing Location
United States
Product Details
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for great retention

Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for excellent diamond retention, with controlled diamond placement and protrusion.

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Product Disclaimer
  • Use of pad conditioners in process is pad dependent. Additional processes may be supported, contact 3M lab to verify product recommendations
  • The technical information and data shown on this page should be considered representative or typical only and should not be used for specification purposes
  • 3M products shown on this website may not be available in all geographic regions or may not be available at this time. Please contact your local sales representative to determine product availability.

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