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3M™ Diamond Pad Conditioner A272, 4.25 inch Diameter
Part Number A272, 3M ID 60020021212, UPC 00051111901335
Overview
Specifications
Product Details
Resources
Specifications
|
Attribute Name
|
Value
|
|---|---|
|
Abrasive Working Surface
|
Ring Face
|
|
Aggressiveness
|
1-10
|
|
Application
|
CMP
|
|
Carrier Color
|
Gray
|
|
Carrier Format
|
Disk - with bevel edge
|
|
Carrier Size
|
4.25 inch diameter
|
|
Carrier Substrate
|
304 SS
|
|
CMP Process
|
STI Process
|
|
Diamond Size
|
63 um
|
|
Diamond Type
|
Type 9, sharp
|
|
Manufacturing Location
|
United States
|
|
Mineral Type
|
Nickel based alloy with patterned diamond
|
|
Product Series
|
A272
|
|
Product Type
|
Diamond Pad Conditioner
|
|
TDS Required
|
No
|
Product Details
- Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
- Optimized for extended pad and disk life
- Diamonds secured with both chemical and mechanical bonds for superior retention
Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for superior diamond retention, with controlled diamond placement and protrusion.
Resources
Legal Disclaimer
Product Disclaimer
Use of pad conditioners in process is pad dependent. Additional processes may be supported, contact 3M lab to verify product recommendations
The technical information and data shown on this page should be considered representative or typical only and should not be used for specification purposes
3M products shown on this website may not be available in all geographic regions or may not be available at this time. Please contact your local sales representative to determine product availability.
3M United States
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