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3M™ Diamond Pad Conditioner A168, 4.25 inch Diameter

Part Number A1683M ID XA004100500
    • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
    • Optimized for extended pad and disk life
    • Diamonds secured with both chemical and mechanical bonds for superior retention
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    Specifications
    Attribute Name
    Value
    Abrasive Working Surface
    Full Face
    Aggressiveness
    15-19
    Application
    CMP
    Carrier Color
    Black
    Carrier Format
    Disk - with bevel edge
    Carrier Size
    4.25 inch diameter
    Carrier Substrate
    Polycarbonate
    CMP Process
    Cu (bulk), PMD/ILD, STI Process, W (bulk)
    Diamond Size
    251 um
    Diamond Type
    Type 4, semi-sharp
    Manufacturing Location
    Singapore
    Mineral Type
    Nickel based alloy with patterned diamond
    Product Series
    A168
    Product Type
    Diamond Pad Conditioner
    TDS Required
    Yes
    Product Details
    • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
    • Optimized for extended pad and disk life
    • Diamonds secured with both chemical and mechanical bonds for superior retention

    Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for superior diamond retention, with controlled diamond placement and protrusion.

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