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  • 3M™ Diamond Pad Conditioner A165P, 4.25 in diameter
  • 3M™ Diamond Pad Conditioner A165P, 4.25 in diameter

    Part Number A165P3M ID XA006703038
    • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
    • Optimized for extended pad and disk life
    • Diamonds secured with both chemical and mechanical bonds for superior retention
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    Specifications
    Attribute Name
    Value
    Abrasive Working Surface
    Full Face
    Aggressiveness
    15-19
    Application
    CMP
    Carrier Color
    Gray
    Carrier Format
    Disk - with bevel edge
    Carrier Size
    4.25 inch diameter
    Carrier Substrate
    304 SS
    CMP Process
    Cu (bulk), PMD/ILD, STI Process, W (bulk)
    Diamond Size
    251 um
    Diamond Type
    Type 4, semi-sharp
    Manufacturing Location
    Singapore
    Mineral Type
    Nickel based alloy with patterned diamond
    Product Series
    A165P
    Product Type
    Diamond Pad Conditioner
    TDS Required
    No
    Product Details
    • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
    • Optimized for extended pad and disk life
    • Diamonds secured with both chemical and mechanical bonds for superior retention

    Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for superior diamond retention, with controlled diamond placement and protrusion.

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    Product Disclaimer
  • Use of pad conditioners in process is pad dependent. Additional processes may be supported, contact 3M lab to verify product recommendations.
  • The technical information and data shown on this page should be considered representative or typical only and should not be used for specification purposes.
  • 3M products shown on this website may not be available in all geographic regions or may not be available at this time. Please contact your local sales representative to determine product availability.

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