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3M™ Diamond Pad Conditioner A153L, 4.25-in dia

Part Number A153L3M ID 60020015180UPC 00051111722831
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for great retention
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Specifications
Attribute Name
Value
Abrasive Working Surface
Full Face
Aggressiveness
6-9
Application
CMP
Brand
3M™
Carrier Color
Gray
Carrier Format
Disk - with bevel edge
Carrier Material
304 Stainless Steel
Carrier Size
4.25 inch diameter
Carrier Substrate
304 SS
CMP Process
Cu (barrier), Final Buff, STI Process, W (buff)
Diamond Size
151 um
Diamond Type
Type 3, semi blocky
Manufacturing Location
United States
Mineral Type
Nickel based alloy with patterned diamond
Product Series
A153L
Product Type
Diamond Pad Conditioner
TDS Required
Yes
Product Details
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for great retention

Highly engineered pad conditioners deliver reliable performance offering excellent diamond retention, with controlled diamond placement and protrusion for critical semiconductor CMP applications.

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