1. All 3M Products
  • 3M™ Betapure™ AUL Series Filter Cartridge
  • 3M™ Betapure™ AUL Series Filter Cartridge

    40  Products
    • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
    • Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
    • The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration
     More...
    Diameter
    Length
    Micron Rating
    Width
    End Modification
    40 Products Available
    Available options:
     Diameter, Length, Micron Rating, Width and End Modification
    All Options
    Showing 24 of 40
    Close
    Specifications
    Attribute Name
    Value
    Application
    Chemical Mechanical Planarization (CMP), Electronics
    Brand
    Betapure™
    Diameter
    2.5 in, 2.72, 2.92, 2.92 in
    Diameter (Metric)
    6.35 Centimeter, 7.42 Centimeter
    End Modification
    222 connector, flat cap and EPR o-rings., Double Open End, with Valora Polyolefin Foam end caps.
    Filter Material
    Polyethylene: polypropylene bi-component fiber and glass fiber
    Filter Type
    Depth
    Gasket/O-ring Material
    EPR, Valora Polyolefin Foam end caps
    Industries
    Industrial
    Length
    10, 10 in, 20 in, 30 in, 5 in
    Length (Metric)
    12.7 Centimeter, 25.4 Centimeter, 50.8 Centimeter, 76.2 Centimeter
    Maximum Operating Temperature (Celsius)
    40 Degree Celsius
    Maximum Operating Temperature (Fahrenheit)
    104 Degree Fahrenheit
    Micron Rating
    0.7 Absolute, @ 95%, 0.7 μm
    Product Series
    AUL
    Series
    Betapure™ AUL Series
    Units per Case
    1, 15, 30
    Width
    2.92 in
    Width (Metric)
    7.416 Centimeter
    Product Details
    • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
    • Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
    • The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration

    3M™ Betapure™ AUL Series Filter Cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring bi-component fiber technology with targeted multizone filtration layers to enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

    3M™ Betapure™ AUL Series filter cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring 3M’s bi-component fiber technology with targeted multi-zone filtration layers enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

    Our filter is specifically designed to have a rigid filter structure which retains consistent pore size even under intermittent process conditions. Changes such as those caused by pump fluctuations, stopping and restarting the system, or high differential pressure will have minimal, if any effect on product consistency. Depth filtration reduces LPCs, and provides superior classification of slurry particles to help minimize scratching and chatter marks.

    The targeted multi-zone construction optimizes both LPC reduction and enhanced flow characteristics, including extremely low pressure drop, to minimize shearing of the slurry while providing superior service life.

    3M™ Betapure™ AUL Series Filter Cartridges are available in 5”, 10”, 20”, and 30” lengths with 222 connector, flat cap, and EPR o-rings, and in a 10” double open-end filter with polyethylene foam end caps.

    Follow Us
    The brands listed above are trademarks of 3M.
    Change Location
    United States - English