3M™ Novec™ products include a broad range of heat transfer fluids, cleaning solvents and surfactants. These sustainable materials are designed to increase throughput, performance and reliability, while helping you keep costs under control.
The 3M™ Novec™ products line includes a broad range of heat transfer fluids, cleaning solvents and surfactants. These next-generation compounds are designed to increase throughput, performance and reliability, while helping you keep costs under control.
3M™ Novec™ Engineered Fluids offer a wide range of operating temperatures with efficient heat transfer performance for sustainable thermal management in semiconductor operations that can reduce greenhouse gas emissions by up to 95 percent.
Increasingly complex structures and concerns about safety and materials compatibility have made semiconductor cleaning and drying more challenging than ever before. To help meet these challenges, wafer fabs around the world are recognizing the outstanding safety, sustainability and performance advantages of non-flammable 3M™ Novec™ Engineered Fluids.
With ever decreasing critical dimensions found in advanced semiconductor wafer manufacturing, surface wetting is more important than ever. 3M™ Novec™ Electronic Surfactants provide low surface tensions at lower concentrations compared to non-fluorinated options. They deliver more consistent process results through improved etch uniformity without compromising etch rates.
For years, 3M™ Novec™ Engineered Fluids have proven to be highly effective for wet cleaning of semiconductor dry etcher parts. Because of their non-flammability, cleaning speed and more favorable safety and environmental profiles, they are frequently used to replace conventional solvents for wipe cleaning of chambers and for parts cleaning baths.